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軟物質微納加工實驗室

時間:2018-03-14瀏覽:2399設置

軟納米平臺Soft NanoLab;SNL)是專門為了研發各類軟材料、將軟材料制備成各種應用器件,而創建的一個微納加工共享平臺;本平臺全名為:軟物質微納加工實驗室Soft Matter Nanofabrication Laboratory)。本平臺實驗室位于物質學院7號樓一層南側,性質為電子廠房凈化室王者彩票app登录,包含千級和萬級兩個潔凈區域王者彩票app登录,共占地650平方米;本平臺為小規模、高水平微納加工實驗室王者彩票app登录,將提供最先進的微納加工設備,主要功能有光刻、蝕刻、薄膜、和器件封裝與測試,專為新型軟物質的器件開發提供支撐性科研服務。


軟納米平臺既是物質科學與技術學院三大科研支撐平臺之一王者彩票app登录,同時王者彩票app登录,也是上?王者彩票app登录?萍即髮W重點科研資源平臺之一。由上海市政府提供建設經費,在上??萍即髮W相關部門的合作及指導下,本平臺由物質科學與技術學院主要負責相關規劃籌建、以及運行。本平臺的建設構想由物質科學與技術學院創建院長楊培東院士提出,主要為新能源王者彩票app登录、新生物王者彩票app登录、新量子科學發展,為不同領域的軟材料器件研究提供最先進的微納加工能力;此外,軟納米平臺作為一校級大型設備共享平臺,不僅對校內全面開放,更將鼓勵校內外科研合作或業界產品開發,滿足微納加工需求,以實現“推進科技進步驅動產業發展”的創新價值。未來軟納米平臺將致力成為一個集學、研、制、測一體化的科研平臺王者彩票app登录,作為上??萍即髮W的科研保障基地之一。


平臺主頁鏈接:http://eshare.shanghaitech.edu.cn/spst/rnm/


Soft Matter Nanofabrication Laboratory, as we would abbreviate it as Soft NanoLab (SNL), is one of major shared platforms at ShanghaiTech University. This platform was founded in 2017 and the aim is to accelerate the research and development for soft materials and their device-level applications. Soft NanoLab is located in the south side of the 1ST floor in the Building #7, of the School of Physical Science and Technology (SPST). It is a clean room for microelectronics manufacturing, and the clean room area is ~650 square meter consisting of Class 1,000 and Class 10,000 areas, specifically. Soft NanoLab considers itself as a small-scale yet high-standard platform, serving its users with state-of-the-art tools of lithography, etching, thin film growth, and packaging/testing. Our micro/nanofabrication tools are specifically for bolstering research regarding rising soft matter with potentials for future applications.


Soft NanoLab is one of the three research centers and shared platforms in the School of Physical Science and Technology. Meanwhile, it is also one of key shared resource for research at ShanghaiTech. With the financial support from Shanghai Municipal People’s Government, and with synergistic efforts of ShanghaiTech’s administrative offices, School of Physical Science and Technology is in charge of founding SNL as well as operating SNL. The initial blueprint of Soft NanoLab was originally depicted by the Founding Dean of SPST, Prof. Peidong Yang. Mainly, Soft NanoLab will provide state-of-the-art micro/nanofabrication capabilities to promote next-generation devices using soft materials for applications particularly in energy, biology, and quantum electronics. Being a major platform at a university-level, Soft NanoLab is not only open to users across the campus, but also to external users. By sharing complete capabilities in device research, Soft NanoLab encourages both academic and industrial collaborations on soft materials in their pathways towards applications. Soft NanoLab will devote future efforts in integrating functions in teaching/learning, researching, fabricating/testing, and demonstrating, in order to become a top-notch platform in ShanghaiTech.


More informationhttp://eshare.shanghaitech.edu.cn/spst/rnm/


編號

儀器名稱

儀器名稱(英文)

圖片

型號

生產廠家

設備狀態

1

等離子體增強化學氣相沉積PECVD

OXFORD NGP80 PECVD  


OXFORD NGP80 PECVD

OXFORD

已購置

2

原子層沉積系統

Atomic Layer Deposition  


Savannah

VEECO

2019年招投標

3

電子束蒸發

E-beam Evaporator  


PRO Line PVD 75

Kurt J. Lesker  

2019年招投標

4

磁控濺射系統

Magnetron sputtering system


PRO Line PVD 75

Kurt J. Lesker   

已購置

5

快速熱處理系統

Rapid Thermal Annealer


AccuThermo AW610  

Allwin21.corp

已購置

6

臺階儀

Surface Profiler


Dektak XT

BrukerStylus Profiler  

已購置

7

橢偏儀

Ellipsometer


SE850DUV

SENTECH

2019年招標

8

光學顯微鏡

Optical Microscope


Axio Lab.A1,ZEISS

ZEISS

已購置

9

原子力顯微鏡

Atomic Force Microscope  


Cypher S

Asylum Research

已購置

10

膜厚測量系統

Film Thickness Measurement System


TohoSpec3100  

Toho Technology Corporation/Japan

已購置

11

半導體器件分析儀

Semiconductor Parameter Analyzer  


KeySight B1500A

Keysight Technologies

已購置

12

探針臺

Probe Station


Signatone S1160  

Signatone

已購置

13

聚合物光刻系統

Polymer Pen Lithography System


TERA-print M

TERA-print

已購置

14

臨界點干燥儀

Critical Point Dryer  


Tousimis Autosamdri-815B Series C  

Tousimis

已購置

15

晶圓切割機

Wafersaw


DISCO DAD323


已購置

16

接觸角

Contact Angle Measurement Instrument (tensiometer)


SL200KS

Kino  

已購置

17

微控楔鍵合機

Wirebonder


West Bond 7476E

West Bond

已購置

18

腐蝕清洗臺

Wet Bnech


SFQ-604SKSX

中國電子科技集團公司第四十五研究所

已購置

19

烤膠機-1

Hot plate-1


Mycro HP1000-1+Rocker300

Mycro

已購置

20

烤膠機-2

Hot plate-2


Mycro NDK-1K

Mycro

已購置

21

紫外曝光機

Ultraviolet exposure machine-1


SüSS MJB4  


已購置

22

激光直寫光刻系統

Laser direct writing lithography system


Quantum Design Microwriter ML3  


已購置

23

3D共聚焦激光顯微鏡

3D Material Confocal Microscope


Zeiss LSM800

Zeiss

已購置

24

氦離子聚焦離子束顯微鏡

Helium Ion Microscope‐Focused Ion Beam  


Zeiss ORION NanoFab  

Zeiss

采購中

25

HMDS真空烘箱

HMDS Oven


Yes 310TA  


已購置

26

勻膠旋涂儀

Spin Coater  


Laurell WS 650  


已購置

27

Wafab顯影槽

Wafab Developing Bench


Wafab Manual  


已購置

28

Wafab剝離槽

Wafab Lift-off Bench


Wafab Manual  


已購置

29

Wafab濕式清洗槽

Wafab Acid Etching Bench


Wafab Manual  


已購置

30

甩干機

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/

奧曼特

已購置

31

反應離子刻蝕

Reactive Ion Etch


Advanced Vacuum VISION 322   


已購置

32

離子束刻蝕

Ion Beam Mill  


Intlvac Nanoquest I  


已購置

33

薄膜應力測試系統

Stress measurement system


Toho FLX2320S


已購置

34

紫外固化爐

UV-Ozone


Samco UV-2


已購置




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